ASTM D5544-2005 在线测量高纯度水蒸发后残留物的标准试验方法

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【英文标准名称】:StandardTestMethodforOn-LineMeasurementofResidueAfterEvaporationofHigh-PurityWater
【原文标准名称】:在线测量高纯度水蒸发后残留物的标准试验方法
【标准号】:ASTMD5544-2005
【标准状态】:现行
【国别】:
【发布日期】:2005
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:D19.03
【标准类型】:(TestMethod)
【标准水平】:()
【中文主题词】:半导体;试验;污染;高;残留物;水
【英文主题词】:high-puritywater;nonvolatileresidue;residueafterevaporation
【摘要】:Evenso-calledhigh-puritywaterwillcontaincontaminants.Whilenotalwayspresent,thesecontaminantsmaycontributeoneormoreofthefollowing:dissolvedactiveionicsubstancessuchascalcium,magnesium,sodium,potassium,manganese,ammonium,bicarbonates,sulfates,nitrates,chlorideandfluorideions,ferricandferrousions,andsilicates;dissolvedorganicsubstancessuchaspesticides,herbicides,plasticizers,styrenemonomers,deionizationresinmaterial;andcolloidalsuspensionssuchassilica.Whilethistestmethodfacilitatesthemonitoringofthesecontaminantsinhigh-puritywater,inrealtime,withoneinstrument,thistestmethodisnotcapableofidentifyingthevarioussourcesofresiduecontaminationordetectingdissolvedgasesorsuspendedparticles.Thistestmethodiscalibratedusingweighedamountsofanartificialcontaminant(potassiumchloride).Thedensityofpotassiumchlorideisreasonablytypicalofcontaminantsfoundinhigh-puritywater;however,theresponseofthistestmethodisclearlybasedonaresponsetopotassiumchloride.Theresponsetoactualcontaminantsfoundinhigh-puritywatermaydifferfromthetestmethodrsquo;calibration.Thistestmethodisnotdifferentfrommanyotheranalyticaltestmethodsinthisrespect.Togetherwithothermonitoringmethods,thistestmethodisusefulfordiagnosingsourcesofRAEinultra-purewatersystems.Inparticular,thistestmethodcanbeusedtodetectleakagessuchascolloidalsilicabreakthroughfromtheeffluentofaprimaryanionormixed-beddeionizer.Inaddition,thistestmethodhasbeenusedtomeasuretherinse-uptimefornewliquidfiltersandhasbeenadaptedforbatch-typesampling(thisadaptationisnotdescribedinthistestmethod).Obtaininganimmediateindicationofcontaminationinhigh-puritywaterhassignificancetothoseindustriesusinghigh-puritywaterformanufacturingcomponents;productioncanbehaltedimmediatelytocorrectacontaminationproblem.Thebiomedicalandpower-generatingindustrieswillalsobenefitfromthisinformation.1.1Thistestmethodcoversthedeterminationofdissolvedorganicandinorganicmatterandcolloidalmaterialfoundinhigh-puritywaterusedinthesemiconductor,aerospace,andotherindustries.Thismaterialisreferredtoasresidueafterevaporation(RAE).Therangeofthetestmethodisfrom0.1g/L(ppb)to20mg/L(ppm).1.2Thistestmethodusesacontinuous,realtimemonitoringtechniquetomeasuretheconcentrationofRAE.Apressurizedsampleofhigh-puritywaterissuppliedtothetestmethod''sapparatuscontinuouslythroughultra-cleanfittingsandtubing.Contaminantsfromtheatmospherearethereforepreventedfromenteringthesample.GeneralinformationonthetestmethodandaliteraturereviewonthecontinuousmeasurementofRAEhasbeenpublished.1.3ThevaluesstatedinSIunitsaretoberegardedasthestandard.Thevaluesgiveninparenthesesareforinformationonly.1.4Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.Forspecifichazardsstatements,seeSection8.
【中国标准分类号】:Z16
【国际标准分类号】:71_040_40
【页数】:9P.;A4
【正文语种】: